Project Consortium


Ulusal Metroloji Enstitüsü (UME), the Turkish National Metrology Institute founded in 1992, is part of the legal entity Turkiye Bilimsel ve Teknolojik Arastýrma Kurumu (TUBITAK). The task of TUBITAK UME is to establish and maintain national measurement standards in accordance with the SI Units persuading its scientific and technological development in order to anticipate new measurement and testing requirements in the areas of energy, safety, health, quality and environmental protection and to represent Turkey at an international level in the field of metrology. TUBITAK UME meets the requirements for calibration and testing laboratories as defined in the EN ISO/IEC 17025 employing a staff of about 244 people whom of 144 is researcher (Graduate 76, PhD Degree 56).

Dimensional Group has wide range of experience on investigation of dimensional instruments and development/design of high precision dimensional measurement devices (ranging from interferometric measurements to form and CMM measurements) while Wavelength standards group has wide range of experience in laser applications. Recently dimensional group developed a High Precise Small Angle Generator (HPSAG) for calibration of high resolution autocollimators with an expanded uncertainty of 0.01”. The device currently works with 0.5 nrad resolution and 2 nrad repeatability for generation of small angles. Wavelength standards group constructed a Differential Fabry-Perot Interferometer (DFPI) under previous EMRP project (iMERA-Plus) ' NANOTRACE ' and achieved a picometre level displacement measurements taken against comparison with NPL X-ray interferometer. The group is continuing their work under current EMRP JRP SIB08 ' subnano ' for displacement measurements and wants to apply picometre sensitivity level displacement measurements to ' nrad ' and ' sub-nrad ' level angle measurement by extensive cooperation of dimensional group.

TUBITAK UME takes important part of the work within the JRP including the coordination. The institute is the initiator of this JRP with another NMI and submitter of the topic for SRT and is involved in all work packages as well as leading WP4 and WP6 since angle metrology is placed in strategic priorities of TURKEY. They would like to contribute using their High Precision Rotary Table fitted with state of the art commercial encoder (ERP880) for investigations of encoders and reducing uncertainty parameters with one head reference encoders in realisation of radian (WP3). The ERP880 is the only one among the other commercial encoders used in RTs of NMIs and based on interferential scanning principle producing signals largely free of harmonics and highly interpolated. Therefore performance will be different than other commercial encoders when shearing methods are investigated in WP3. The RT has special nano-step drivers for achieving high angular resolution and repeatability and will be used for calibration of Autocollimators in WP1 and WP2 in various configurations. They will also use their HPSAG for investigations in nrad and sub-nrad level as well as application of Fabry-Perot Int. to angle measurement. They want to bring their expertise for development of LRSAGs as they have designed and constructed different types SAGs so far. Therefore, they are leading WP4 and contributing for development and applications of SAGs in various levels. TUBITAK UME also will take important roles in WP5 by extending their cooperation during dissemination and impact activities for the targeted non-European countries as they work in other EC projects.

The JRP-Coordinator, Dr Tanfer YANDAYAN, has been working in the field of dimensional metrology for 20 years with his extensive experience from Manchester University of UK (5 years) and managing dimensional group of TUBITAK UME (15 years). He worked in World Bank projects during establishment of new TUBITAK labs. He has been the CCL delegate and EURAMET TC-L contact person of TURKEY since 1997 and giving training, consultancy and being assessor for accreditation labs including EURAMET peer reviews. He has also get involved in Framework Programmes of EC being representative of TUBITAK UME and worked personally in Fp7 project, SEA-EU-NET, for facilitation of cooperation activities between South East Asia and Europe in the field of metrology. He covers almost all areas of dimensional metrology but mostly specialised in angle metrology.

Key Publications:

Yandayan T., Ozgur B., Karaboce N. and Yaman O. “High precision small angle generator for realization of SI unit of plane angle and calibration of high precision autocollimators”, Meas. Sci. Technol. 23 (2012).

Yandayan T., Akgöz S. A. and Haitjema H., “A novel technique for calibration of polygon angles with non-integer subdivision of indexing table,” Precision Engineering: J. Int. Soc. Precision Engineering and Nanotechnology, 26, 412-424 (2002).

Yandayan T., Akgöz S. A. and Haitjema H., “A new calibration method for polygons with pitch angle which does not match with the subdivision of the used indexing table,” Proc 3rd Int. Conference, euspen, Eindhoven, The Netherlands, 481-484, May 26-30, 2002

Yandayan T., “Application of the novel technique for calibration of 23-sided polygon with non-integer subdivision of indexing table,” IMEKO 8th International Symposium on ISMQC, Erlangen, Germany, October 12-15, 2004.

Yandayan T., Karaboce N., Ozgur B., and Yaman O."Small Angle Generators for Angle Measurement", International Metrology Conference CAFMET 2010, Cairo, Egypt

M.Çelik, R.Hamid, U. Kuetgens, A.Yacoot, Picometre displacement measurements using a differential Fabry-Perot optical interferometer and x-ray interferometer, Meas. Sci. Technol., Vol. 23, pp. 085901(6pp), 2012

M.Pisani, A.Yacoot, P. Balling, N. Bancone, C. Birlikseven, M. Çelik, J. Flügge, P. Kochert, U. Kuetgens, G.B.Picotto, M. Tedaldi, P. Kren, A. Lassila, R. Hamid, E. Ţahin, J. Seppä, C. Wiechert, Comparison of the performance of the next generation of optical interferometers, Metrologia, Vol. 49, pp.455-467, 2012

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The Centro Espańol de Metrología (CEM) is the Spanish National Institute of Metrology responsible for the development, maintenance and dissemination of the measurement national standards. The Length Area is in charge of realising and maintaining the national standard of length, the metre, and the national standard of the plane angle, the radian, both SI units. The Length Area also occupies of disseminating both units by calibrating standards, instruments and measurement systems of lower metrological levels, providing them with the necessary traceability. To fulfil their missions the Length Area is divided into six laboratories: Primary, Dimensional Metrology, Angle, Form Measurements, Surface Quality and Topographic Instruments, all of them with qualified staff. Their calibration and measurement capabilities published in the BIPM web page and their results in international key and supplementary comparisons support their technological and scientific competence.

CEM participates in WP1, WP2, WP3, WP4, WP6 and leads the WP5. CEM had led the impact WP of previous EMRP project (Long Distance) and will bring their expertise they gained to this JRP. CEM has special Rotary Table (produced by IK4-TEKNIKER) fitted with RON 905 for realisation of SI unit radian. They want to use this table as well as other angle measurement equipment to make contribution for applications of methods developed in the JRP and develop new methods for calibration of angle encoders.

CEM will cooperate also with most all JRP-Partners but specifically with IK4-TEKNIKER, producer also of the IPQ RT (having a similar design to the CEM’s one) to make improvements in the realisation of SI angle unit radian. Special designed RT will also be used for validation of the methods developed in WP3. Using their high level equipment, CEM will also take part in WP1 and WP2 for investigation of autocollimators. CEM will cooperate with FAGOR AUTOMATION (Spanish angle encoder manufacturer) while doing investigations for calibration of angle encoders and will use their previous experiences from Long Range Metrology particularly for the requirements in angle encoders used in surveying devices (laser trackers etc.). CEM have already brought two unfunded JRP-Partners (IK4-TEKNIKER and FAGOR AUTOMATION) into the JRP for cooperation. CEM will also cooperate with ALBA-CELL (Spanish synchrotron facilities) in applications side of angle metrology. CEM will work with IK4-TEKNIKER to design a second large range small angle generator mechanism. CEM will also lead the tasks of calibrating one reading head encoders using a second one as standard and developing appropriate calibration procedures, piloting a comparison of novel calibration methods for autocollimators by using rotary tables fitted with angle encoders, realisation, commissioning and validation of a large range small angle generator mechanism in the range of ±3600” and, in WP5, transferring the knowledge of the JRP outputs and producing best practice guides for calibration of autocollimators and angle encoders.

Emilio Prieto is the Head of the CEM Length Area, with 30-year experience in length metrology. He is the contact person in the EURAMET TC-L, and representative of CEM in the CIPM Committees CCL and CCU. He has participated in previous EURAMET and EMRP projects in the different Calls and is responsible of some national R&D projects.

Mar Pérez is responsible of both the Primary Length and Angular Measurements Labs. With 19-year experience in metrology, she has the chair of the Dimensional Metrology Calibration Committee of ENAC, the Spanish Accreditation Body. Her tasks at CEM consist of realising and maintaining the national standards of length and plane angle, by calibrating lasers and full interferometric laser systems and, in angle metrology, by calibrating rotary tables, autocollimators and angular standards. She develops technical procedures and participates in key and supplementary comparisons, being also responsible of some national projects related to this matter. Helping Industry to solve their measurement problems is always a priority.

CEM has worked in various metrological areas, some related to angle metrology; a few publications are given below.

Key Publications:

A. Abou-Zeid, Th. Badr, P. Balling , J. Jokela, R. Kugler, M. Matus, M. Merimaa, M. Poutanen , E. Prieto, S. van den Berg, J-P. Wallerand, M. Zucco, Towards new absolute long distance measurement systems in air, NCSLI-08, Orlando, Florida (USA), 3-7 August 2008.

E. Prieto, The key role of metrology in the development of nanotechnology, Russian-Spanish Innovation Business Forum, Feria de Madrid (IFEMA), 12-14 May 2011.

E. Prieto, M. Pérez, S. Santana, A.A. Arce, R. Calvo, A. Gutierrez, G. Kortaberria, F. Egańa, E. Trapet, Calibration of laser tracker systems: Developments at the Spanish Centre of Metrology (CEM), MacroScale 2011 – Recent Developments in traceable dimensional measurements, METAS, Wabern (Switzerland), 4-6 October 2011.

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CMI is the Czech national metrology institute with about 300 employees. CMI performs metrology research and maintains national standards, disseminates units, performs certification of reference materials, executes the state metrological control of measuring instruments and performs many other activities. The main scope covers work on calibrations and legal metrology for industry. The R&D activities are about 20 % of the overall work.

The CMI department of angle metrology involved in this JRP has precision autocollimators Elcomat 3000 and 2000, small angle generator and other equipment for realisation of SI unit radian.

In the CMI department for the primary length standards several primary wavelengths standards (iodine stabilised lasers 633 nm, 543 nm, and 532 nm and acetylene stabilised laser 1.54 µm (all are traceable to CMI’s fs-comb) was developed. These lasers are successfully used in CMI developed interferometers IK-1 (counting interferometer - CMI piloted the related EUROMET 610 project) and IDKM (long gauge blocks, thermal expansion measurement) which took part in relevant international comparisons. The CMI interferometric scanning technique for flatness measurement with uncertainty of about a few nm took also part in high accuracy flatness intercomparison (EURAMET 672). The scientists in this department have long time experience on displacement measurement in nanoscale. Successful participation in EUROMET 866 and also fromer EMRP project - iMERA-Plus NANOTRACE have been realised.

In this JRP, CMI will be active in WP1, WP4, WP5 and WP6. CMI will cooperate with JRP-Partners to make improvements in the realisation of SI angle unit radian particularly solving issues related to linear measurement in nanoscale that will be converted to angles. In WP4 CMI will design an angular interferometer for large range small angle generators and also large range angle generator mechanism using their extensive knowledge in laser applications and designing of interferometers. CMI will in WP1 also cooperate on design of 2-axis autocollimator calibrator based on interferometry.

CMI will offer their angle metrology equipment; autocollimators (Elcomat 2000 and 3000), counting optical interferometers, scanning differential interferometer for flatness measurement (developed in CMI), various distance sensors (capacitive, inductive).

František Dvorácek is the head of the CMI Angle Department, with 6-year experience in length and angle metrology.

Petr Kren from the primary length department has more than 12 years of experience in the length metrology. He successfully developed various optical laser standards and interferometric devices. He took part in several international metrological comparisons and CCL-WGDM meetings.

Key Publications:

P. Kren: A simple interferometric method for determining the flatness of large optical flats with 1 nm repeatability. Meas. Sci. Technol. Volume 19, Number 10 (2008) 107001 (5pp)

P. Balling, P. Mašika, P. Kren, M. Dolezal: Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy. Measurement Science and Technology Volume 23, Number 9 (2012)

P. Balling, P. Kren, P. Mašika: Femtosecond frequency comb based distance measurement in air; et al. OPTICS EXPRESS Volume 17 Issue: 11 Pages: 9300-9313 (2009)

P. Kren, P. Balling: Common path two-wavelength homodyne counting interferometer development. Meas. Sci. Technol. Volume 20, Issue: 8 (2009)

P. Kren: Linearisation of counting interferometers with 0.1 nm precision. Int. J. Nanotechnol. Volume 4, Number 6 (2007)

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The INRIM is the Italian National Metrological Institute, in charge of all SI units except those involving ionising radiations. In particular, it is responsible for mechanical units, and – among them – metrology in dimensional metrology. This latter is supervised by the Division of Mechanics whose programmes Dec 13 – Mise en pratique of the metre and technologies for space and Jan 14 – Precision engineering covers length metrology.

The INRIM has not only the duty of maintaining, improving and disseminating the SI units, but also to promote the technological transfer to industry. Particularly the Precision engineering Programme has a record for cooperation with, and support to manufacturing industry.

The INRIM will lead WP3 – Metrological investigations on precise angle encoders. In particular, it will develop a new angle comparator, which will be the INRIM standard, and a novel absolute encoder. To achieve this, the expertise in angle measurement and high resolution interferometry of INRIM staff will be exploited, as well as the capability of the INRIM’s workshops to realise high quality artefacts.

Marco Pisani is a senior scientist, with sound experience in spectroscopy, in dimensional metrology (angle and form in particular) and in nanometrology. He was the coordinator of the JRP Nanotrace. He has developed a recognised experience in designing and realising front end opto-electronic devices.

Milena Astrua , is a researcher with long experience in angle metrology. She is responsible for the angle and roundness national calibration facilities. Pisani and Astrua have realised novel devices for angle measurements and angle generation.

Key Publications:

Pisani M, Yacoot A, Balling P, Bancone N, Birlikseven C, Celik M, Flueugge J, Hamid R, Koechert P, Kren P, Kuetgens U, Lassila A, Picotto G, Sahin E, Seppa J, Tedaldi M, Weichert C (2012). Comparison of the performance of the next generation of optical interferometers. METROLOGIA, vol. 49, p. 455-467, ISSN: 0026-1394, doi: doi:10.1088/0026-1394/49/4/455

PISANI M (2009). A homodyne Michelson interferometer with sub-picometer resolution. MEASUREMENT SCIENCE & TECHNOLOGY, vol. 20, p. 084008-084013, ISSN: 0957-0233

PICOTTO G.B, PISANI M, SOSSO A (2009). A multi-electrode plane capacitive sensor for displacement measurements and attitude controls. MEASUREMENT SCIENCE & TECHNOLOGY, vol. 20, p. 084011-084014, ISSN: 0957-0233

PISANI M, ASTRUA M (2009). The new INRiM nanoangle generator. METROLOGIA, vol. 46, p. 674-681, ISSN: 0026-1394

PISANI M (2008). Multiple reflection Michelson interferometer with picometer resolution. OPTICS EXPRESS, vol. 16, p. 21558-21563, ISSN: 1094-4087

PISANI M, ASTRUA M (2006). Angle amplification for nanoradian measurements. APPLIED OPTICS, vol. 45, p. 1725-1729, ISSN: 0003-6935

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IPQ is the Portuguese National Metrology Institute (NMI). Its mission is to assure the accuracy and the traceability of the measurements in Portugal, realising the constitutional purpose of sovereign national measuring standards and realising the metrological control of measuring instruments satisfying the Portuguese industrial and society needs.

IPQ is responsible for the national standards of the measuring units, for the traceability of the Portuguese reference standards, for the technical support to the legal metrology activities and for the realisation of national calibration laboratories comparisons and participation in the relevant international ones. The IPQ Length Laboratory is responsible for the development of the national standards and realises calibration in dimensional measurements. The Length laboratory has participated in several European and international comparisons and has 15 CMCs published in the field of length measurements.

Angle metrology is in strategic priorities of Portugal. IPQ participates in WP1 for investigation of autocollimators for different beam path lengths; WP2- intercomparison of autocollimator calibrations at small apertures; WP3- application of shearing techniques in different reference angle measurements RTs , and participation in the dissemination of the JRP output to end users (WP5). The IPQ will use their special rotary table fitted with RON905 in order to contribute investigations outlined above particularly revealing the information about application of developed methods in different standards.

The experts participating in this JRP are Fernanda Saraiva, Degree in Technological Physics, is head of the Metrology Length Laboratory and contact person of EURAMET TC-L. Responsible for the maintenance and development of the metrological standards of length, support to the Legal Metrology Control and participation in Portuguese technical committees of standardisation, Sílvia Gentil, Degree in Mechanical Engineering, graduated as a technician of the length laboratory since 1997.

Key publications:

F.Saraiva, S.Gentil, Angular Measurements at the Primary Length Laboratory in Portugal, 13ş Congrčs International de Métrologie, Transverse Disciplines in Metrology; French College of Metrology, p. 183-191, 2009, ISBN 9781848210486

Pisani M., Saraiva F, Turka e, Lillepea l (2010). Final report on EUROMET.L-K3.1 (EUROMET Project 870). METROLOGIA, vol. 47; p. 04005-04005, ISSN: 0026-1394.

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The Laboratoire National de Métrologie et d'Essais (LNE) is committed to excellence in measurement and testing for the benefit of industries and consumers alike. LNE's public service mission enables to operate as the national reference laboratory in metrology, pursue its scientific and technological development in order to anticipate new measurement and testing requirements in the spheres of energy, safety, health, quality and environmental protection, provide state authorities and key economic players with the technical assistance they require to draft new regulations and standards at national, European and International level.

LNE and it's dimensional department has a long experience in development and design of high precision measuring machines as well as in metrological investigation on dimensional instruments. In the past last years, the dimensional laboratory developed national reference rotary table for angular measurement , X,Y cross table with nm range uncertainties, and metrological AFM. In 2006 a new stylus profilometer was designed at LNE, based on Digital Surf technology. In 2009, LNE started the development of a new machine to measure straightness and cylindricity with nanometre-level of accuracy (< 10 nm) on micro/macro-parts. LNE is involved also a PhD thesis on CMM calibration, based on laser tracer measurement, in close collaboration ENS-Cachan (Automated Production Research Laboratory "LURPA" department). LNE built in the 90's the new French angular reference platen through an internal research program. This RT has been recently updated with a new electronics bringing automation in the calibration. LNE RT applies special principle for measurement of angle based on a set of two commercial fours head's encoder mounted in a way that one encoder is fixed while the second is rotation with the platen . The two encoders are mounted in opposite and are rigidly connected by their stator which is continuously rotating, so that each angle position is obtain by about 9000 synchronous acquisitions on each grating disk for each revolution. The angle turned is then obtained by subtraction of these two sets of data.

LNE will take part in WP3 and WP4 in the JRP by using their special RT and will bring their long term expertise to investigations in angle encoders particularly in errors due to rolling defects. While doing this in WP3, LNE will use the advantage of their RT is that the rotation can be done continuously up to 7 turns which allow the study of signature of encoder on several continuous turn. LNE will upgrade its rotary table by implementing axial and radial run-out control by the way of an internal hexapod actuators and a set of internal movement sensors. Investigation on alignment, laser beam alignment and orthogonally with rotary axe will be done in WP4 using upgraded features of LNE’s RT.

Dr Georges Vailleau is the head of the dimensional laboratory at LNE since 1991.He was involved in and led several projects of reference standard and machine at LNE such as angular rotary table, nanometric X-Y table and more recently a form measuring machine. He is a member of EURAMET-TCL and CCL committees.

Dr José SALGADO , has 10 years of experience in dimensional metrology and is the responsible for interferometric measurements, linescales and stage micrometer measurements. He has successfully developed various precision measuring instruments such as a stage micrometer calibration instrument and 3D roughness measuring instrument . He is also member of the French working group on surface texture standards.

Key Publications:

S. Leleu: Towards a new national angular reference Design, manufacturing and charactérisation, PhD thesis, LNE, France, 2000, supervisors : David J-M. and Vailleau G-P.,

H. Nouira, A. Vissičre, G-P. Vailleau, M.Damak and J-M. David, Investigation of the influence of the main error sources on the capacitive displacement measurements with cylindrical artefacts, recently submitted to the journal of Measurement Science and Technology (2010)

S. Ducourtieux, F. Larsonnier, L. Lahousse, S. Leleu, J.-M. David, G.-P.Vailleau: LNE ultraprecision coordinate measuring machine :Calibration results for the XY metrology loop, 9th int. conf. of the European society for precision engineering and nanotechnology, San Sebastien, Spain 2009.

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Glówny Urzad Miar (GUM), the Polish National Institute of Metrology is part of the legal entity, Ministerstwo Gospodarki (MG) and is responsible for ensuring appropriate accuracy of the results of measurements carried out in Poland and their traceability to the International System of Units (SI). One of the main tasks of MG (GUM) is to establish, maintain and modernise the national measurement standards, to carry out R&D projects in this field and to ensure dissemination of the values of the legal units from the national measurement standards to measuring instruments of lower metrological levels. In the Length and Angle Department four national standards of units are maintained: length, plane angle, refractive index and optical rotation. The Department consists of four Laboratories: Length, Angle, Industrial Measurements and Taximeters and Tachographs, which carry out tasks associated with measurements in the field of length, plane angle, surface texture parameters, hardness, refractometry, polarimetry as well as testing of taximeters and instruments for speed control in road traffic. In all Laboratories qualified staffs are employed. The most of services carried out in the Department are covered by CMCs and published in the BIPM website. Laboratories participate in key and supplementary comparisons.

MG (GUM) will extensively participate in WP2, WP3, WP5 and WP6 since angle metrology is placed in strategic priorities of Poland. In WP2 and WP3, MG (GUM) will mainly use the measuring station of national standard of plane angle unit which consists of the special Rotary Table (produced by Kugler GmbH, Germany) fitted with the one reading head encoder RON905 and autocollimator ELCOMAT HRC as well as other angle measurement equipment. The previous station of national standard of plane angle unit, in the measuring range of full rotation, was replaced with the new one six years ago. All measuring methods, connected with this station, were changed.

MG (GUM) will cooperate with other JRP-Partners in the frame of WP3 to improve angle metrology in the field of angle encoders, especially encoders with one reading head and to investigate the methods of calibration of the precise autocollimators by use of rotary tables fitted with angle encoders. MG (GUM) will also cooperate in the frame of the Task 2.3 of WP2 to develop the device enabling high reproducible positioning of small apertures relative to the optical axis of the autocollimator. In WP5 MG (GUM) will take part in works leading to transfer the new knowledge and elaborate the guides for calibration of angle encoders and autocollimators.

Joanna Przybylska is the Head of the Angle Laboratory. She has been working in dimensional metrology for 28 years with 16-year experience in angle metrology. She led one intercomparison of measurements of angle blocks (EUROMET No. 456). She is the person responsible for national standards of the plane angle unit and refractive index unit. She is responsible for and take part in R&D projects at MG (GUM) in the field of angle metrology. She is also the technical evaluator in PCA (Polish Centre for Accreditation).

Katarzyna Nicinska is the main metrologist with 12-year experience in angle metrology. She is the person who carries out works on national standard of plane angle unit. She has elaborated algorithms and developed technical procedures for the measurements with the use of the precise Rotary Table, the national standard of the plane angle unit. She takes part in R&D projects at MG (GUM) in the field of angle metrology and presents the results in national metrological conferences. She participates in key comparisons (polygons, angle blocks, autocollimators).

Key publications:

J. Przybylska, Zmodernizowane stanowisko panstwowego wzorca jednostki kata plaskiego (Modernised measuring station of the national standard of plane angle unit), Kongres Metrologii, Lódz (Poland), 6 – 8 September 2010.

K. Nicinska, Wzorcowanie przyrzadów do pomiaru malych katów (Calibration of the instruments for the measurements of small angles), Konferencja Podstawowe Problemy Metrologii, Krynica-Zdrój (Poland), 3 – 6 June 2012.

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MIKES is the National Metrology Institute of Finland. The MIKES Length group research activities cover wide range from realisation of national measurement standards instruments like stabilised lasers and interferometers to closely industry related issues like form, angle and co-ordinate metrology. The experience in angle metrology is demonstrated in a recent EURAMET comparison for autocollimators. One recent activity related to angle metrology is the development of an equipment for the calibration of squareness standards. This instrument is based on a rotary table with traceable angle through polygon and autocollimator based calibrations.

Key researcher in this JRP at MIKES is Dr Björn Hemming who has 20 years experience in dimensional metrology and is responsible for angle measurements at MIKES. He has developed various precision measurement instruments. He has over 30 scientific and technical publications. He has also worked as trainer and consultant in the field of industrial measurements. Another researcher is Ilkka Palosuo with ten year of experience in metrology.

The length program leader at MIKES, Dr Antti Lassila, has more than 20 years of experience in dimensional metrology. He has successfully managed several research projects and has been chairing the EURAMET TC-L since 2010. In these projects MIKES has developed various high-precision measuring instruments such as a line scale interferometer, metrology AFM, 2D interferometer and laser diffractometer. He has over 70 scientific and technical publications.

In the JRP, MIKES will develop a 2D (2 axis) Autocollimator calibration mechanism based on interferometry. This will complement the investigations that will be carried out by another participant’s 2D calibration system based on two reference autocollimators. Thus, 2D calibration of autocollimators will first be performed in the world. MIKES will heavily participate in WP1 and WP2 as well as WP5 taking task leaderships.

Key Publications:

Björn Hemming, Antti Korhonen, Ilkka Palosuo, Antti Lassila, Equipment for the calibration of squareness standards, Meas. Sci. Technol, 23 (2012)

V. Korpelainen, A. Iho, J. Seppä and A. Lassila, High accuracy laser diffractometer: Angle-scale traceability by error separation method with a grating, Meas. Sci. Technol, 20 (2009)

A. Lassila, E. Ikonen and K. Riski, Interferometers for calibration of length standards, Optical Engineering 34 (1995).

M.Pisani, A.Yacoot, P. Balling, N. Bancone, C. Birlikseven, M. Çelik, J. Flügge, P. Kochert, U. Kuetgens, G.B.Picotto, M. Tedaldi, P. Kren, A. Lassila, R. Hamid, E. Ţahin, J. Seppä, C. Wiechert, Comparison of the performance of the next generation of optical interferometers, Metrologia, Vol. 49, pp.455-467, 2012

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The PTB is the National Metrology Institute (NMI) of Germany and operates under the auspices of the Federal Ministry of Economics and Technology. Its activities include the determination of fundamental constants, the realisation, maintenance, and dissemination of the SI units, the provision of services and metrology for industry, and technology transfer. PTB has about 1600 employees and meets EN ISO/IEC 17025. The Angle Metrology Group at PTB is responsible for the dissemination of the SI unit ‘radian’ (plane angle). It focuses on research and development, as well as calibrations, in this field, in international collaboration with industry and research institutes. Our spectrum of tasks covers basic research on new measurement procedures and mathematical algorithms, the improvement of the design of measuring instruments, and the application-oriented characterisation and calibration of angle measuring devices, such as autocollimators and angle encoders. PTB operates a primary angle standard with a standard uncertainty of its calibration of u = 0.001 arcsec (5 nrad), the lowest available value worldwide.

WP1 and WP2 will be lead by PTB. The improvement of autocollimator calibration and performance (WP1) and the advancement of angle metrology for the characterisation of beamline optics at synchrotron and X-ray Free Electron Laser (XFEL) facilities worldwide (WP2) is a strong research focus at PTB. To guide these WP, PTB will utilise our extensive knowledge on autocollimator characterisation and calibration, especially with respect to variable measuring parameters. Calibrations with the ultra-precision primary angle standard will be provided by PTB. The experience in leading international comparisons will be used to guide the participant’s calibration efforts and to analyse calibration data. Ray tracing of a commercial autocollimator is available at PTB to link experimental data to opto-mechanical causes. The Spatial Angle Autocollimator Calibrator (SAAC) designed will be constructed at PTB. When finished, it will be the first facility worldwide for the traceable two-axis calibration of autocollimators. PTB also have ample experience in improving autocollimator performance at small apertures and will coordinate this effort in close collaboration with the manufacturer Möller-Wedel Optical. PTB is deeply involved in the advancement of angle metrology for the characterisation of synchrotron and XFEL beamline optics, including extensive experience with the design, adjustment, and operation of profilometers. PTB will serve as the prime contact to synchrotron and XFEL metrology laboratories worldwide, especially the REG Helmholtz-Zentrum Berlin, to ensure a close matching of the objectives of WP2 with the needs of the community. Major conferences of the community are attended regularly by PTB and the results of this JRP will be presented and feedback solicited.

PTB will also participate in WP3, WP4, WP5, and WP6. In addition to the expertise and calibration capabilities described in the sections above, PTB will make use of its extensive research and software libraries on self-calibration methods for the fast and precise in-situ calibration of angle encoders without recourse to external reference standards. This research will aid in the dissemination of the SI unit ‘radian’ by an easier creation of primary standards at NMIs and by lowering the associated uncertainties. This includes adapting error-separating shearing methods to the improved calibration of autocollimators. In WP5 and WP6, PTB staff will utilise their experience as the pilot laboratory of the EURAMET.L-K3.2009 Key Comparison on autocollimator calibration, as regular CMC and peer reviewers of NMIs, and in the accreditation of industrial calibration laboratories.

Ralf D. Geckeler is head of PTB’s Angle Metrology Group. He received his PhD from the Eberhard-Karls University, Tübingen, Germany, in 1998. During his 14 year research career, he (co-)authored 3 patents and 70 scientific papers. He has successfully managed several research projects, participated in peer reviews and Calibration and Measurement Capabilities (CMC) reviews of NMIs, and currently leads the international EURAMET.L-K3.2009 Key Comparison on autocollimator calibration with 27 participants.

Dr. Gerd Ehret is a researcher of PTB's 'Form and Wavefront Metrology' group and is currently setting up a unique flatness measurement system with sub-nm uncertainty and investigates new deflectometric approaches to also accurately measure curved surfaces. He has more than 12 years experience in optical metrology (optical flatness / form metrology, optical microscopy, rigorous and raytrace optical modelling, optical antireflexion) and published more than 40 scientific papers

Key publications:

R.D. Geckeler, A. Just, M. Krause, V.V. Yashchuk, 2010: Autocollimators for deflectometry: Current status and future progress, Nucl. Instrum. Methods Phys. Res., Sect. A 616, 140-146

A. Just, M. Krause, R. Probst, H. Bosse, H. Haunerdinger, C. Spaeth, G. Metz, W. Israel, 2009: Comparison of angle standards with the aid of a high-resolution angle encoder, Precis. Eng. 33(4), 530-533

Ralf D. Geckeler, 2007: Optimal use of pentaprisms in highly accurate deflectometric scanning, Meas. Sci. Technol. 18 (No. 1), 115-125

R.D. Geckeler, A. Just, 2007: Optimised use and calibration of autocollimators in deflectometry, Proc. SPIE 6704, 670407, 12 p.

Ralf D. Geckeler, Andreas Fricke, Clemens Elster, 2006: Calibration of angle encoders using transfer functions, Meas. Sci. Technol. 17 (No. 10), 2811-2818

A. Just, M. Krause, R. Probst, R. Wittekopf, 2003: Calibration of high-resolution electronic autocollimators against an angle comparator, Metrologia 40, 288-294

G.Ehret, M. Schulz, M. Stavridis and C. Elster: Deflectometric systems for absolute flatness measurement at PTB, Meas. Sci. Technol. 23 094007 (2012)

M. Schulz, G. Ehret G and A. Fitzenreiter: Scanning deflectometric form measurement avoiding pathdependent angle measurement errors J. Eur. Opt. Soc.:Rapid Publ. 5 10026 (2010)

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SMD is the Belgian national institute for national standards. It is a division of the Federal Public Service Economy. Its main task is the development, maintenance and dissemination of the national measurement standards for the SI units. The section Dimensional Metrology covers the realisation of and maintaining the national standard of length, the metre, the national standard of the plane angle, the radian, both SI unit and the dissemination of those units and traceability to industry and research through calibrations. Furthermore, SMD has a role as advisor to industry, research and legal metrology in different topics related to calibration, traceability and uncertainty evaluation.

SMD – ENS - Dimensional Metrology covers primary length standard, length, nanometrology, form and angle. There is more than 20 years of experience in angle standards and angle measurements. The equipment consists of 2 high precision indexing tables, 6 autocollimators with different resolutions going down to 0,001 arcsecond, polygons, an angle interferometer and a newly developed hybrid system which combines a large range very high resolution angular interferometer with a high resolution full circle angular Heidenhain encoder. The new system and the high resolution autocollimators will be available for this EMRP project.

SMD will be active in WP4, WP5 and WP6. SMD is Lead Participant for tasks 4.5.1, 4.5.2 and 4.5.3 and will bring its expertise in the hybrid system and related uncertainties to this JRP.

Hugo Pirée is the Head of the SMD Dimensional Metrology section and has 30 years of experience in length metrology. He is the contact person in the EURAMET TC-L. He has participated in previous EURAMET and EMRP projects in the different Calls.

Gerard Kotte has a very good expertise in precision mechanical construction principles and dimensional metrology for more than 25 years.

Key publications:


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" The Metrology Institute of Japan (MIJ) " and " the Metrology Management Center " both together making up the National Metrology Institute of Japan (NMIJ) is part of the legal entity, the National Institute of Advanced Industrial Science and Technology (AIST). Those two equally important AIST (NMIJ) organisations cooperate with each other for AIST (NMIJ) to function as a single institution in charge of measurement standards. AIST (NMIJ) devotes themselves to various tasks in order to facilitate development of Japanese economic activities in the international market. AIST (NMIJ) also conducts research and development activities of measurement standards. Moreover, AIST (NMIJ) provides metrological services such as testing and inspections of measuring instruments as well as metrological training.

The Length Area in AIST (NMIJ) is divided into two sections: length standards section and dimensional standards section. The length Area in AIST (NMIJ) focuses on research and development of advanced technology for measurement of length and geometrical quantities to provide accurate standards, and engage in frequent implementation of international comparisons, improvement of technical manuals and handbooks, and supply of quality standards. Research activities in the field of dimensional standards include the establishment of geometrical metrology (straightness, flatness, roundness, and three-dimensional coordinates measurements), critical dimension and nanometre-scale shape metrology (one-dimensional and two-dimensional gratings, step height, linewidth, and surface roughness), angle metrology (rotary encoders, polygons, and autocollimators), provision of standards, international comparisons, and development of state-of-the-art measuring technologies, such as in the field of nanometrology. Those metrological research activities use various probe techniques, using laser light, mechanical probes, and electron beams, and various laser interferometers using light sources with the wavelength traceable to the unit of length. In addition, AIST (NMIJ) have started to develop new deflectometry using an autocollimator in order to the establish flatness metrology for large area.

AIST (NMIJ) participates in all of WPs. AIST (NMIJ) has developed three different type of Rotary Tables for realisation of SI unit radian, one is a primary angle standard that uses EDA-method (u = 0.005 arcsec; autocollimator calibration uncertainty u = 0.02 arcsec, polygon mirror calibration uncertainty u=0.045), and an Indexing RT with fitted pair rotary encoders; one rotary encoder’s reading head is fixed and other encoder’s reading head is moving with work table, and compact RT with fitted multiple reading heads angle encoder (SelfA: Self-calibratable Angle device) used for generation of angles using subdivision of 2? rad. AIST (NMIJ) also has a small angle generator based on angular interferometer in the range of ±1500” (autocollimator calibration uncertainty u = 0.015 arcsec).

Dr Youichi Bitou is the chief of the length standards section with 12 -year experience in length metrology at AIST ( NMIJ). He is the responsible for stabilised lasers, interferometric measurements, gauge block, flatness standard.

Dr Tsukasa Watanabe i s the senior research scientist with 12-year experience in angle metrology at AIST (NMIJ). He is the responsible for rotary encoder, autocollimator, polygon mirror and angle gauge block. He charges in development of compact and low cost SelfA encoder.

Key publications:

Youichi Bitou , Toshiyuki Takatsuji , Kensei Ehara , Simple uncertainty evaluation method for an interferometric flatness measurement machine using a calibrated test flat , Metrologia (2008).

Tsukasa Watanabe, Hiroyuki Fujimoto, Kan Nakayama, Tadashi Masuda and Makoto Kajitani, Automatic high-precision calibration system for angle encoder, volume 4401, 267–274, SPIE, 2001

Tsukasa Watanabe, Hiroyuki Fujimoto, Kan Nakayama, Makoto Kajitani and Tadashi Masuda, Calibration of a polygon mirror by the rotary encoder calibration system, Proc. 17th IMEKO World Congress, 1890–3, 2003

Tsukasa Watanabe, Hiroyuki Fujimoto, and Tadashi Masuda, Self-calibratable rotary encoder, Journal of Physics: Conference Series, 13:240–245, 2005.

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FAGOR AUTOMATION is a company with great experience in the development and manufacturing of products for machine automation and control. It excels by its capability to develop software and the versatility of its productive process to offer solutions tailored to the needs of their customers. Historically, FAGOR AUTOMATION has focused their efforts on the machine-tool sector where we are one of the world leaders. Besides, its wide technical and sales network spread out in more than 50 countries through its own branch offices and distributors. FAGOR AUTOMATION career has been so successful thanks to our investing efforts in R&D+i (Research, Development and innovation) and in infrastructure that made it possible for us to tackle projects of high strategic relevance. An example of this, are the new facilities for photolithography to produce engraved glass that is used in our linear feedback systems.

Traditionally, the company has dedicated more than 10 % of its turnover to R&D+i; it currently has 85 R&D engineers and 6 doctors dedicated to developing new automation and optics technologies integrated into the products developed by FAGOR AUTOMATION.

An important part of their product portfolio is the position measuring systems. FAGOR AUTOMATION has been manufacturing high quality linear and rotary encoders using precision optical technology for more than 30 years. Over the years FAGOR AUTOMATION has created, developed and patented systems, components and technologies that allow us to offer best quality and features over the complete range of product utilizing innovative production methods.

In order to ensure quality and reliability in all its products FAGOR AUTOMATION utilises the most advanced technology and testing and manufacturing facilities. From centralised computer control temperature monitoring, cleanliness and relative humidity control, a must for the feedback system manufacturing process, to laboratories for climate, vibration and EMC testing to certify the designs.

FAGOR AUTOMATION develops with maximum professionalism the three cornerstones in encoder design: optical design, electronic design and mechanical design that result in a state of-the-art product.

An important part of the encoder products is the accuracy certificate. Every single FAGOR AUTOMATION encoder is subjected to an extensive final accuracy check. This control is carried out on a computerised measuring bench equipped with a laser interferometer located inside a climate controlled chamber at 20şC. The resulting final accuracy graph is supplied with every FAGOR AUTOMATION encoder.

FAGOR AUTOMATION will cooperate with JRP-Partners particularly in investigations for calibration of angle encoders and their use in industrial applications (WP3).

More information can be found on the web page:

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IK4-TEKNIKER is a non-profit making research organisation located in the Basque Country (North of Spain). IK4-TEKNIKER works in a wide field of technologies related to manufacturing technologies for improvement and innovation. The main objective set at IK4-TEKNIKER is to bring R&D conducted under contract. With a stable income from R&D activities (approx. €7m from a total of €13m) and 198 experienced researchers (18 PhD, 96 MSc, 33 BSc) IK4-TEKNIKER is an active research organisation that brings critical expertise related to two departments: i) Precision engineering and mechatronics: design and manufacture of mechatronic products; advanced calculation and simulation; design and adjustment of controllers; ii) Dimensional metrology department: Besides providing measuring and calibration services to industry, it works in close collaboration with other departments in order to bring their understanding of metrological aspects of precision engineering developments. The close collaboration of these departments offers a unique capability to develop the most demanding devices in terms of reliability and accuracy for industry and scientific facilities.

IK4-TEKNIKER participates mainly in WP4. In close collaboration with CEM will develop a large range small generator mechanism. The development will consider the definition of the requirements, the study of different conceptual designs, detailed design and manufacturing of the selected solution as well as the commissioning and validation. IK4-TEKNIKER will also cooperate with other JRP-Partners in order to implement advanced angle measuring devices developed within the JRP in the small angle generator mechanism generator.

Antonio Gutiérrez is the head of IK4-TEKNIKER dimensional metrology department, with more than 20 year in length metrology experience.  He has the secretary of the Dimensional Metrology Calibration committee of ENAC, the Spanish Accreditation Body. He has been working in advanced metrological services for a wide range of industrial sectors, using the most advanced equipment and technologies, given the answer than the companies need in metrology and calibration. He has been also involved in a lot of national and international research projects related to precision engineering and metrology. He has participated in different project developing turn-key metrological solution using the most advanced technologies

Aitor Olarra is responsible for the R&D activity related to metrological developments of IK4-TEKNIKER. He has more than 10 years experience on the development of precision engineering projects. He has worked both for the machine tool industry as well as for the scientific community.

Key publications:

R. Calvo, A. Gutierrez, E. Prieto, Adaptación de banco comparador interferométrico para la calibración de bloques patrón y step gauges, a la calibración de reglas a trazos de elevada precisión, 23 Bienal Espańola de la Máquina Herramienta, Bilbao (Espańa), 7-12 Junio 2004.

Calvo R., Gutierrez A. Highly demanding large scale metrology (Nasmyth rotators for Gran Telescopio de Canarias). Metromeet. Bilbao (Spain), 2005.

Olarra. A. Compliant Mechanisms for Metrology. Metromeet. Bilbao (Spain). March 8- 9, 2007

Calvo R, Gutierrez A, Olarra A. Technologies for the development of Advanced dimensional metrology equipment. National congress on metrology. Santander (Spain), 2009

E. Prieto, M. Pérez, S. Santana, A.A. Arce, R. Calvo, A. Gutierrez, G. Kortaberria, F. Egańa, E. Trapet, Calibration of laser tracker systems: Developments at the Spanish Centre of Metrology (CEM), MacroScale 2011 – Recent Developments in traceable dimensional measurements, METAS, Wabern (Switzerland), 4-6 October 2011

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The Korea Research Institute of Standards and Science (KRISS) is the Korean National Metrology Institute (NMI) responsible for the development, maintenance and dissemination of the measurement national standards. KRISS provides internationally recognised national measurement standards to its customers in various industries as a means to help improve the quality and competitiveness of Korean industrial products and exports in global markets. KRISS has also engaged in developing new measurement technologies and standards required for cutting-edge technological innovations, such as in nanotechnology, biotechnology, and information and communications technologies.

The Centre for Length is in charge of realising and maintaining the national standard of length, surface texture and angle. They also disseminate both units by calibrating standards of lower metrological levels and provide them with the necessary traceability. They have a long experience in development and design of high precision measuring machines as well as in metrological investigation on dimensional instruments. In the past last years, they developed national reference rotary table for angular measurement. In 2005 a new small angle generator was built at KRISS, based on laser interferometer. From 2010, KRISS built an angle generator (rotary table, RT) using multiple ultrasonic motors and a self-calibrating encoder. This RT has been applied the equal-division-averaged (EDA) method which can compensate the scale error effectively with multiple encoder heads. Two arrangement sets of twelve encoder heads divided the full circle equally by 6 and 7 (one head was commonly used for each set). Using the averaged readouts of 6 and 7 encoder heads from the two sets, the EDA method can obtain the complete Fourier spectrum of the scale error of the divided circle except 6 × n and 7 × n (n= 1, 2, … ) order terms, respectively. Therefore, the combination of these error spectrums restores the complete scale error. KRISS also are developing their own encoder head and new algorithm to reduce the nonlinear error caused by the distortion of optical signals.

KRISS participates in WP3 in the JRP by using their RT and will bring their long term expertise to investigations in angle encoders particularly in errors due to signal interpolation. The encoder signal will be compared carefully with a laser interferometer and an autocollimator to investigate the nonlinear error.

Jae Wan Kim is the Head of the KRISS Length Area, with 12-year experience in length metrology. He is the representative of KRISS in the CIPM Committees CCL. He published more than 50 scientific papers and has 20 patents related with measurement techniques. He was involved in and led several projects of reference standard and machine at KRISS such as angular rotary table and three-dimensional surface profiler.

Jong-Ahn Kim has 10 years of experience in dimensional metrology and is the responsible for interferometric measurements, linescales and stage micrometer measurements. He has developed various precision measuring instruments such as a precision rotary table, a linescale calibration instrument, ring gauge calibration instrument, and metrological atomic force microscope. He developed technical procedures and participated in key and supplementary comparisons.

KRISS has worked in various metrological areas, some related to angle metrology; a few publications are given below.

Key publications:

J.-A. Kim, J.W. Kim, C.-S. Kang, J. Jin, and T. B. Eom, High precision angle generator using multiple ultrasonic motors and a self-calibratable encoder, Rev. of Sci. Instrum., vol. 82, pp. 116108 (2011)

R. Jang, C.-S. Kang, J.-A. Kim, J. W. Kim, J.-E. Kim, and H. Y. Park, High-speed measurement of three-dimensional surface profiles up to 10 µm using two-wavelength phase-shifting interferometry utilizing an injection locking technique, Apl. Opt. Vol. 50, Iss. 11, pp. 1541–1547 (2011)

J. W. Kim, C.-S. Kang, J.-A. Kim, T. B. Eom, M. Cho, and H. J. Kong, A compact system for simultaneous measurement of linear and angular displacements of nano-stages, Optics Express, Vol.15, No. 24, 15759-15766 (2007)

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The ‘in kind’ contribution from MWO is not included in the planned eligible costs and shall not be considered as receipts to the project.

MÖLLER-WEDEL OPTICAL GmbH (MWO) is a private company, engaged in the development, production and sales of precision optical testing instruments. The company has a long tradition in development and production of angle measuring instruments, especially of visual and electronic autocollimators (e.g. well known ELCOMAT series), classical goniometers, goniometer-spectrometers and automatic goniometers. Beside these products the company develop, produce and supply other optical test equipment like dioptre telescopes, interferometers, focometers, binocular testing instruments and so on.

MWO participates as an unfunded JRP-Partner in WP1 and WP2. MWO has three special Rotary Tables fitted with ERP 880 for test and calibration of autocollimators and angle standards like polygons. With two of them MWO is capable to realise high precise measurements at different path length. MWO will use this measuring base for tasks described in WP1 and WP2.

MWO will cooperate specifically with PTB in the field of characterisation of path length influences, optimization of reticles for autocollimators. MWO, producer of state of the art autocollimator (ELCOMAT 3000, the unique one used in profilometers) will also provide some instrumentation that is not available in any other JRP-Partner as well as expertise and knowledge.

MWO will make an ELCOMAT direct available for this project which is based on a 2D detector (CCD) and to enable reading out of the image data. This will greatly aid the other JRP-Partners in their research on all tasks in WP1 and WP2.

Moreover, MWO will cooperate in the field of improvement of autocollimators performance at small apertures, e.g. experimental characterisation of non-orthogonalities of the autocollimator’s axes, development of improved reticles for small aperture applications, development and testing of different algorithms for the precise location of the reticle image.

MWO has previously worked in a Cooperating Research Project “Nanometer-Optikkomponenten NOK” (BMBF/VDI FKZ 13N7027). project “Optik Nanotechnologie Komponenten” and developed an electronic autocollimator for the BESSY profilometer for synchrotron optics.

Key publications:

W. Duis, J. Trede and G.-J. Ulbrich, J.D. Moller Optische Werke GmbH, Moller-Wedel and M. Mross “Design and performance of a high resolution, high accuracy automatic autocollimator”, SPIE, Vol. 1167, Precision Eng. And Optomechanics, 297-304 (1989).

J. Illemann, R. Geckeler, I. Weingärtner, C.Schlewitt, B. Grubert, O.Schnabel „Topography measurement of nanometer synchrotron optics“, SPIE , Vol. 4782, pp. 29-37 (2002)

F.Siewert, Lammert H., Noll T., Schlegel T., Zeschke T., Hänsel T. Nickel A., Schindler A., Grubert B., Schlewitt C., Advanced metrology: an essential support for the surface finishing of high-performance x-ray optics”, SPIE , Vol. 5921 (2005)

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The Helmholtz-Zentrum Berlin für Materialien und Energie (HZB) is a member of the Helmholtz Association of German, a government-financed research institution with public status under German law. The HZB operates two large scale scientific facilities for investigating the structure and function of matter: the research reactor BER II for experiments with neutrons and the synchrotron radiation source BESSY II, producing ultra-bright photon beams ranging from Terahertz to hard X-rays. Due to this, HZB is one of the few centres world-wide to offer the whole range of instruments for neutron and synchrotron radiation within one laboratory structure. In the department of solar energy, HZB scientists are working on the next generation of solar cells, including new kinds of materials and innovative cell structures.

The BESSY-II Optics Laboratory ( BOL) is one of the leading facilities in the field of metrology for synchrotron optics worldwide. Up to 50 ultra-precise optical elements are under inspection at BOL per year. The Nanometer Optic Component Measuring Machine (NOM) developed at the BOL is in use at various synchrotron laboratories worldwide by now. The BOL is contract JRP-Partner of DESY (D) and the European XFEL (D) for the inspection of high-end synchrotron optical elements and will also contribute to the MAX-IV synchrotron (S).

HZB participates in WP1, WP2 and WP5. HZB will provide its equipment, e.g., the Vertical Angle Comparator (VAC), for the investigation on autocollimator performance within WP1 and WP2. HZB will offer several ultra-precise plane, spherical, and aspherical, as well as periodic and chirped optics, for intercomparison of slope measuring profiler. HZB will provide its expertise in the design, development, and operation of slope measuring profiler.

HZB will cooperate also with most JRP-Partners, but specifically with PTB, AIST, MWO, TUBITAK, MG, IPQ, CEM, and the other synchrotron facilities which are involved, e.g. BNL/NSLSII, ALS, APS, ALBA- CELL.

Frank SIEWERT is currently Group Leader of the Optical Metrology Group of the Institut für Nanometer Optik und Technologie at the BESSY-II storage ring of the Helmholtz Zentrum Berlin. He is working in the field of synchrotron optics since 1996 and is with the BESSY-II synchrotron since 12 years. He is co-inventor of the Nanometer Optic Component Measuring Machine (NOM). Together with his co-workers he received the ’European Innovation Award on Synchrotron Radiation’ in 2009 for the development of the NOM. Beside metrology for synchrotron optics, he has contributed to different fields of research related to synchrotron optics, like deterministic surface finishing, beamline design, single and multilayer coatings, diffractive optical elements (gratings), and FEL-beamline related developments. He has contributed to the development of NOM-like slope measuring profilers at Diamond Light Source (UK), Lawrence Berkeley National Laboratory – ALS (USA), and at Argonne National Laboratory – APS (USA). He is co-working on a Round Robin comparisons of slope measuring profilers with most European synchrotrons, as well as with the ALS, APS, NSLS-II (all USA), the SPring-8 synchrotron, and the Osaka University (both in Japan). He is co-working on deterministic surface finishing with the Leibniz Institut for Surface Modification - IOM Leipzig (D) and Carl Zeiss Laser Optics GmbH (D) and on adaptive synchrotron mirrors with Bruker ASC GmbH (D) and the European XFEL (Hamburg). He is member of the Project Review Panel on Methods and Instrumentation of DESY (Hamburg), the VDI/VDE committee on X-ray Optical Systems, and the Competence Centre of Excellence for Ultra Precise Surface Treatment (CC-UPOB e.V.). Since 2006 he is a co-organiser of the International Workshop on Metrology for X-ray Optics, Mirror Design and Fabrication (IWXM).

Key publications:

H. Lammert, T. Noll, T. Schlegel, F. Siewert, T. Zeschke, Optisches Messverfahren und Präzisionsmessmaschine zur Ermittlung von Idealformabweichungen technisch polierter Oberflächen, Patent No.: EP 1 585 938 B1 (07.26.2006)

Siewert F, Noll T, Schlegel T, Zeschke T, Lammert H, The nanometer optical component measuring machine: a new sub-nm topography measuring device for x-ray optics at BESSY , AIP Conf: Proc. Vol. 705    (2004)

Mitzner R, Siemer B, Neeb M, Noll T, Siewert, F, Roling S, Rutkowski M, Sorokin AA, Richter M, Juranic P, Tiedke K, Feldhaus J, Eberhardt W, Zacharias H, Spatio - temporal coherence of free electron laser pulses in the soft x-ray regime , OPTICS EXPRESS   Volume: 16   Issue: 24 (2008)

Frank Siewert, Jana Buchheim, Thomas Zeschke, Characterization and calibration of 2nd generation slope measuring profiler, Nucl. Instr. and Meth. A (2010), doi: 10.1016/J.nima.2009.12.033

Frank Siewert, Jana Buchheim, Sebastien Boutet, Garth Williams, Paul A Montanez, Jacek Krzywinski, Riccardo Signorato, Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry, OPTICS EXPRESS Volume: 20, Issue: 4  (2012)

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